Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1788226 | Current Applied Physics | 2009 | 4 Pages |
Abstract
A one-dimensional simulation of a magnetized DC discharge is conducted based on the fluid equations that consider the non-uniform effects of the magnetic field. We apply a dielectric relaxation scheme (DRS) as an efficient numerical algorithm that was recently developed for simulation of low-temperature process plasmas. The simulation results, such as the spatial profiles of ion densities, electron densities, electron fluxes, and electric fields, are compared with the simulation results for which the non-uniform effects of the magnetic field are neglected.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Hee-Jung Kim, Deuk-Chul Kwon, Nam-Sik Yoon,