Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1788237 | Current Applied Physics | 2009 | 5 Pages |
Abstract
Diamond films consist of crystallites having nanometer grains were deposited using low methane concentration by hot filament chemical vapor deposition (HFCVD). The results show that films consist of nanodiamond grains with grain sizes ranging from 20Â nm to 200Â nm having thickness dependent size. Increasing the deposition time, the grain size increases and hence the thickness of the film increases. The diamond nucleation (nucleation density 1010Â cmâ2) is comparable to that obtained by biasing the substrate. The use of low methane concentration for the formation of nano crystallites improves the quality of the film as indicated by Raman spectroscopy. The distance between the filament and substrate is increased while maintaining the substrate temperature. The effects of this large separation on the gas phase chemistry are discussed which helps to understand the reduced size of the crystallites under input gas ratios when microcrystallines are obtained.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Sobia Allah Rakha, Shumin Yang, Zhoutong He, Ishaq Ahmed, Dezhang Zhu, Jinlong Gong,