Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1788738 | Current Applied Physics | 2006 | 4 Pages |
Abstract
The nanoimprinted curved features for focusing grating coupler have been fabricated with hydrogen silsesquioxane mold. The minimum gap between the nanoimprinted curved features is 85 nm and the whole device size is 1 mm × 1 mm. The mold without anti-stiction coating did not cause the failure during separation process. The implemented optical device using nanoimprinted curved features have very small spot size and good output coupling efficient of 347 nm and 28.2%, respectively.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Hojun Ryu, Dongwoo Suh, Mun Cheol Paek,