Design and scaling of nano-electro-mechanical non-volatile memory (NEMory) cells

Design and scaling of the NEMory cell have been discussed. Based on analytical simulation using a simple parallel-plate approximation, scaling guideline is derived in terms of pull-in, release voltage, pull-in time and release time. It has been proved that beam length is the most dominant factor which increases operating voltage with scaling-down. Beam and air gap thickness also need to be scaled down in order to lower operating voltage while improving operating speed.