Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1789301 | Current Applied Physics | 2009 | 4 Pages |
Abstract
We fabricated two-dimensional (2-D) Co magnetic arrays starting from a 40-nm-thick Co layer on a 6-in. Si wafer by photolithography with a KrF laser source and the wet-etching process. Various patterns, including square and triangular lattices, were achieved, with their smallest feature size ranging from 300 to 800 nm. In this paper, we present the key processes to prepare nano-scaled 2-D magnetic arrays and the fabricated structures, along with their magnetic properties.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
W.C. Nam, J.B. Kim, M.S. Seo, T.W. Eom, S.J. Lee, Y.P. Lee,