Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1831596 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2007 | 5 Pages |
Abstract
The 3D silicon radiation detectors are very promising devices to be used in environments requiring extreme radiation hardness, such as the super-LHC experiment at CERN. A drawback of this detector is the very long and non-standard fabrication process, which makes the mass production of these devices very critical. A possible simplification of the manufacturing process relies on a new type of 3D architecture, called 3D-single-type-column detector, that we have introduced in previous works. In this paper we report on the fabrication process of the first batch of detectors and on selected results from the electrical characterization of 3D test structures, covering leakage current, capacitance and breakdown voltage measurements.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Alberto Pozza, Maurizio Boscardin, Luciano Bosisio, Gian-Franco Dalla Betta, Claudio Piemonte, Sabina Ronchin, Nicola Zorzi,