| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1848432 | Nuclear Science and Techniques | 2008 | 5 Pages |
Abstract
In a traditional hot-filament chemical vapor deposition (HF-CVD) system, highly (111)-textured diamond film was deposited on Si (111) substrate treated by diamond powder ultrasonic scratching or other methods. The relationship between the (111)-textured diamond film growth and the nucleation density has been discussed. The morphologies and structures of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Nuclear and High Energy Physics
Authors
YANG Shumin, WAN Dongyun, HE Zhoutong, XIA Huihao, ZHU Dezhang, GONG Jinlong,