Electron exchange influence on the energy loss of ions in SIMOX structure

In this research report we analyse Rutherford back scattering (RBS) measurements with SIMOX structure and transmission experiments with Si single crystals by means of Monte Carlo simulation code with explicit implementation of impact parameter dependence of the electron transfer and the electronic energy loss processes. Although all the basic experimental characteristics of the ion channelling have been successively reproduced, effects related to the charge pre-equilibrium region turned out to be much smaller than these determined from experiment.