Article ID Journal Published Year Pages File Type
239651 Procedia Chemistry 2009 4 Pages PDF
Abstract

The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the tool were also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology.

Related Topics
Physical Sciences and Engineering Chemical Engineering Chemical Engineering (General)