Article ID Journal Published Year Pages File Type
239658 Procedia Chemistry 2009 4 Pages PDF
Abstract

Commercial strain gauges obtain a gauge factor of approximately 2 with a compensated temperature coefficient of resistivity (TCR). Therefore, material development for sputtered thin films with a high gauge factor and negligible TCR was conducted. The object for self compensated sensor materials is the combination of a semiconducting material (negative TCR) with high gauge factor and a metal (positive TCR) leading to a TCR close to zero. With nickel containing diamond-like carbon films (Ni-DLC or a-C:H:Ni) and Ag-ITO compounds zero crossing in TCR and gauge factors higher than 10 were achieved.

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Physical Sciences and Engineering Chemical Engineering Chemical Engineering (General)