Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
239666 | Procedia Chemistry | 2009 | 4 Pages |
Abstract
An innovative low cost packaging technique is used to confine a liquid flow to selected chip areas where integrated thermal flow meters have been fabricated by means of conventional simple post-processing steps. The packaging method is based on a plastic adapter, sealed to the chip using a thermal procedure. Direct contact between liquids and sensitive structures allowed to obtain an interesting combination of high resolution (0.2 ml/h in water) and low full scale pressure drop (5 mBar at 20 ml/h).
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