Article ID Journal Published Year Pages File Type
239670 Procedia Chemistry 2009 4 Pages PDF
Abstract

This paper reports the experimental results of parametric amplification applied to a harmonically forced MEMS gyroscope. Parametric amplification of the forced response at resonance in the range 10–100 is investigated. Several important factors pertinent to practical exploitation are highlighted. The main obstacle to high gain parametric amplification is the nonlinearity of the electrostatic force which becomes significant for high amplitude vibration. By significantly reducing the harmonic forcing level to just above the noise threshold, parametric amplification of the resonant response by a factor of 80 has been achieved whilst maintaining linear response characteristics.

Related Topics
Physical Sciences and Engineering Chemical Engineering Chemical Engineering (General)