Article ID Journal Published Year Pages File Type
239682 Procedia Chemistry 2009 4 Pages PDF
Abstract

In this paper, we will present a novel MEMS Pirani sensor with triple heat sinks. The sensors are made on SOI (Silicon On Insulator) wafers leading to a very simple process and good mechanical structures as compared to alternative surface micromachining processes. Moreover, the proposed Pirani has three heat sinks. The area of heat loss through the ambient gas is greatly enlarged as compared to Pirani sensors with one or dual heat sinks without increasing the dimension of the sensor. Consequently, the dynamic pressure range of the Pirani sensor will be enlarged.

Related Topics
Physical Sciences and Engineering Chemical Engineering Chemical Engineering (General)