| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 239702 | Procedia Chemistry | 2009 | 4 Pages |
Abstract
The resitivity change of ultra thin metals under air exposure is used for vacuum or inert gas packaging control. In order to reach low cost, single use applications, few nm thin Aluminum layers were deposited on PET substrates and combined with wireless electronic readout circuitry.The sensor respose is characterized by resistance changes and explained in terms of multiphase diffusion mechanisms which are very sensitive to technological parameters.
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Chemical Engineering (General)
