Designable 3D nanofabrication by femtosecond laser direct writing

SummaryFemtosecond laser direct writing (FsLDW) has been established as a nano-enabler to solve problems that are otherwise not possible in diversified scientific and industrial fields, because of its unique three-dimensional processing capability, arbitrary-shape designability, and high fabricating accuracy up to tens of nanometers, far beyond the optical diffraction limit. We briefly review the underlying mechanisms for achievement of the superhigh fabrication spatial resolution and surface smoothness, and then discuss the rule and photochemical strategies that are currently exploited for FsLDW. Finally, applications of the delicate nanoprototyping approach in microelectronics, micromechanics, microoptics and microfluidics are introduced.

Graphical abstractFigure optionsDownload full-size imageDownload high-quality image (42 K)Download as PowerPoint slideResearch highlights▶ 3D nanostructure could be fabricated via femtosecond laser direct writing (FsLDW). ▶ The fabrication of micro/nanostructures could be achieved in a designable way. ▶ Fabricating accuracy of FsLDW could reach tens of nanometers. ▶ FsLDW shows great potential for applications in various microdevices.