Novel micromachined lumped band pass filter for 5.2 GHz WLAN applications

This paper describes the design, manufacturing and experiments of a lumped element band pass filter in a new topology. The design starts from a second order capacitive coupled resonator topology. An additional series inductor is inserted in the filter classical topology, for shifting two transmission zeros on the real frequency axes in the filter's band stop, to improve the high frequency response. Design equations for the new band stop resonance frequency are presented together with the analysis of the correspondence between the band pass and band stop attenuation vs. the quality factor of the shunt and series inductors used. The filter is supported on a 6.4 μm thin dielectric membrane, and is manufactured using silicon micromachining, in CPW technology. Measurements illustrated a minimum 2.75 dB insertion loss at 5.5 GHz in the band pass, and more than 40 dB attenuation, at 8 GHz.