| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 480051 | Engineering | 2015 | 5 Pages |
Abstract
ABSTRACTA high-throughput multi-plume pulsed-laser deposition (MPPLD) system has been demonstrated and compared to previous techniques. Whereas most combinatorial pulsed-laser deposition (PLD) systems have focused on achieving thickness uniformity using sequential multilayer deposition and masking followed by post-deposition annealing, MPPLD directly deposits a compositionally varied library of compounds using the directionality of PLD plumes and the resulting spatial variations of deposition rate. This system is more suitable for high-throughput compound thin-film fabrication.
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Physical Sciences and Engineering
Computer Science
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Authors
Samuel S. Mao, Xiaojun Zhang,