Laser Surface Processing of Integrated Thin Film Systems on Arbitrarily Shaped Components

Thin film deposition and laser patterning enable production of integrated electronic thin film sensors on component surfaces. The process consists of two major processing steps: In a first step the component surface is deposited by isolation and sensor films. The sensor film is subsequently patterned by a scanning laser beam in order to generate strain sensor structures. By using a scanning laser beam, in principle any complex shaped surface can be processed. However, scanning of a focused laser beam on curved surfaces requires advanced process knowledge and machine control techniques compared to conventional flat-field laser scanning. We have developed a 3D capable laser scanning process using a femtosecond laser source, a 3-axis galvanometer scanner and a dynamic intensity modulator. The laser process is demonstrated by patterning a NiCr strain sensor on a complex component surface. The results indicate the potential for integration of electronic thin film systems onto the surface of complex component surfaces.