Simulation and Analysis of Highly Sensitive MEMS Cantilever Designs for “in vivo Label Free” Biosensing

In Bio-MEMS applications, low mass loading of biomolecules on rectangular microcantilever beam surface gives negligible deflection at it's free end and poor sensitivity corresponding to the lower concentration of analyte. This paper presents three new microcantilever designs for biosensing, which hold promises for better deflection and higher sensitivity. The proposed designs provide the free end deflection nearly twice as the conventional rectangular beam. The FEM software ANSYS 12.1 is carried out to analyze the deflection of the proposed microcantilever designs.