| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5006169 | Materials Science in Semiconductor Processing | 2017 | 11 Pages |
Abstract
This paper reviews recent work highlighting the potential of LTA as an enabler for next generation technologies covering a wide range of applications from Logic to Nano-Electro-Mechanical Systems (NEMS) and 3D sequential integration.
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Karim Huet, Fulvio Mazzamuto, Toshiyuki Tabata, Ines Toqué-Tresonne, Yoshihiro Mori,