Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5009408 | Sensors and Actuators B: Chemical | 2017 | 21 Pages |
Abstract
This study reports the development of a novel hydrogen gas sensor based on an array of single suspended carbon nanowires (diameter â¼200 nm, length â¼100 μm) decorated with Pd nanoparticles (PdNPs) of various sizes for room temperature H2 gas sensing. These sensors provide high sensitivity, a wide sensing range (10 ppm - 5%), and complete gas response recovery in 5 s with ultralow power consumption (30 μW). Such performance is achieved using a novel suspended PdNP/carbon nanowire architecture, which offers enhanced mass transfer, high surface area to volume ratios, and good thermal insulation. This platform can be fabricated using simple batch microfabrication processes including carbon-MEMS and electrodeposition. The sensitivity and range of the sensor can be modulated by controlling Pd nanoparticle sizes (3-5 nm PdNPs: 3.2% ppmâ1/2, 10-1000 ppm; 10-15 nm PdNPs: 0.32% ppmâ1/2, 700 ppm - 5%). A wide sensing range is achieved by integrating nanowires with various sizes of PdNPs onto a chip. The electrical resistance of a suspended PdNP/carbon nanowire quickly and completely recovers its original state in a very short time via ultralow-power, Joule heat-based self-heating. This enables reproducible and long-term durable gas sensing.
Related Topics
Physical Sciences and Engineering
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Authors
Junyoung Seo, Yeongjin Lim, Heungjoo Shin,