Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5009803 | Sensors and Actuators B: Chemical | 2017 | 7 Pages |
Abstract
Hydrogen sensing characteristics of a Pd/AlGaOx/AlGaN-based Schottky diode-type sensor are comprehensively studied. The AlGaOx dielectric layer is formed by an appropriate hydrogen peroxide (H2O2) treatment on the surface of the AlGaN layer. Experimentally, an extremely high hydrogen sensing response of 3.85Â ÃÂ 105 (under an introduced 1% H2/air gas) and a very low detection limit of 1Â ppm H2/air gas are obtained at 300Â K. This enhanced sensing performance is mainly caused by the effective dissociation of hydrogen molecules based on the presence of the AlGaOx layer. A response (recovery) time constant of 33(17) s is found upon exposure to 1% H2/air gas at 300Â K. The influence of humidity on the hydrogen sensing performance is studied in this work. Based on the improved properties, the studied device could serve as a candidate for high-performance hydrogen sensing applications.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Huey-Ing Chen, Kai-Chieh Chuang, Ching-Hong Chang, Wei-Cheng Chen, I-Ping Liu, Wen-Chau Liu,