Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5009985 | Sensors and Actuators B: Chemical | 2017 | 6 Pages |
This work describes the fabrication of humidity sensors by depositing black phosphorous (BP) nanosheets (prepared by liquid exfoliation of bulk BP) onto a quartz crystal microbalance (QCM) in the form of a thin film. The surface morphology of the prepared BP nanosheets is characterized using a field-emission scanning electron microscope and transmission electron microscopy. The humidity sensing characteristics of the BP-based QCM sensors (such as frequency response, stability, humidity hysteresis, and repeatability) are investigated by using an oscillating circuit method. Experimental results indicate that the BP-based QCM sensors exhibit a well-defined logarithmic frequency response to humidity, and the sensitivity of the sensor is strongly related to the amount of BP nanosheets used in the deposition process. Additionally, the BP-based QCM sensors exhibit high stability over the wide relative humidity range of 11.3%-84.3% RH. The BP-based QCM sensors also exhibit little humidity hysteresis and fast dynamic response and recovery times. This work demonstrates that BP is a promising candidate material for humidity detection when combined with a QCM transducer.