Article ID Journal Published Year Pages File Type
5010106 Sensors and Actuators B: Chemical 2017 7 Pages PDF
Abstract
Three groups of boron-doped ultrananocrystalline diamond (B-UNCD) nanowires (NWs) arrayed on a silicon substrate were prepared by the successive processes: microwave plasma chemical vapor deposition, electron-beam lithography and reactive ion etching. Au electrodes built on both ends of each group of B-UNCD NWs were combined with a basic electrical circuit to form high-performance gas sensor arrays for carbon monoxide (CO) sensing measurements. the B-UNCD with boundary grain size around few nanometers of has been successfully synthesized, and three groups of reasonable straight diamond NWs with the same diameter and different lengths were built on one single substrate. The heavily boron doping of boron ions in the UNCD induced the ohmic contact between diamond and Au electrodes.
Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
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