Enhanced sensing response towards NO2 based on ordered mesoporous Zr-doped In2O3 with low operating temperature

Ordered mesoporous Zr-doped In2O3 and undoped In2O3 nanostructures were synthesized via nanocasting method which is an easy, repeatable and friendly route. Zr incorporation might lead to In2O3 lattice deformation without destroying the original crystal structure and increased chemical adsorbed oxygen species. Gas sensors based on undoped and Zr-doped In2O3 were fabricated and their NO2 gas sensing properties were tested. The sensor performance was improved by Zr-doped strategy. The Zr-doped In2O3 based sensor showed good response (169) toward 1 ppm NO2 at the operating temperature of 75 °C with low resistance of 23 kΩ and the detection limit was 20 ppb. Such favorable sensing performances endowed mesoporous Zr-doped In2O3 with a potential application in the field of gas sensor. The enhanced sensing properties were mainly attributed to its mesoporous microstructures, increased chemical adsorbed oxygen and limited grain size by Zr-doping.