| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5364605 | Applied Surface Science | 2008 | 4 Pages |
Abstract
Nanosphere lithography (NSL) masks were created by spin-coating of polystyrene particles onto silicon surfaces. Fluorinated hydrocarbon films were coated on the nanosphere lithography masks using plasma-enhanced chemical vapor deposition (PECVD) to obtain ordered arrays of fluorinated hydrocarbon. Atomic force microscope images show hexagonally ordered nanodots of dimension 225 ± 11 nm with a height of 23 ± 4 nm. Every hexagon encloses a circular ring of diameter 540 ± 24 nm having a height and width of 13.5 ± 0.6 nm and 203 ± 16 nm, respectively. FTIR analysis shows two distinct zones of atomic bonding of CHx and CFx in the plasma coated ordered fluorinated hydrocarbon films.
Keywords
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Chemistry
Physical and Theoretical Chemistry
Authors
D.K. Sarkar, M. Farzaneh,