Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5441556 | Journal of Non-Crystalline Solids | 2016 | 5 Pages |
Abstract
One dimensional pattern of 500Â nm period was formed on a soda-lime silicate glass by the electrical nanoimprint below the glass transition temperature. The imprinted glass surface was analyzed using a transmission electron microscopy and an energy-dispersive X-ray spectroscopy with the cryogenic system. The concentrated parabolic layers of Ca2Â + and Mg2Â + were formed separately in the Na+ deficient layer. The deficient area both of such alkali and alkaline-earth cations was preferentially removed in an alkali etchant, resulting the enhancement of the aspect ratio of the one-dimensional relief pattern. Therefore, the distribution control of alkaline-earth cations was important for the fabrication of sub-micron scale patterns with high aspect ratio on the glass surface.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Sadatatsu Ikeda, Keiichiro Uraji, Toshio Suzuki, Kiyoshi Yamamoto, Junji Nishii,