Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5488882 | Current Applied Physics | 2017 | 22 Pages |
Abstract
The plasma characteristics of pulse-modulated, radio frequency (RF) power in an inductively coupled plasma discharge were investigated. A two-dimensional axisymmetric structure was simulated based on the fluid model. In addition, the energy and mobility of neutral species were considered. When the power was switched to ON from OFF, the electron density and electron temperature changed instantaneously. When the power was OFF, we analyzed the profiles of the electron density and electron temperature over time. Moreover, the ion energy distribution function was investigated using several RF bias conditions.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
YoungDo Jeong, Young Jun Lee, Deuk-Chul Kwon, HeeHwan Choe,