Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
607354 | Journal of Colloid and Interface Science | 2014 | 6 Pages |
•The aggregation rate behavior and mechanism of alumina nanoparticles was measured.•Mean aggregate sizes were measured over time with a variety of chemical additives.•Reaction limited aggregation was observed, typically followed by a shift to diffusion limited aggregation.
The aggregation rate and mechanism of 150 nm alumina particles in 1 mM KNO3 with various additives used in chemical mechanical planarization of copper were investigated. The pH of each suspension was ∼8 such that the aggregation rate was slow enough to be measured and analyzed over ∼120 min. In general, an initial exponential growth was observed for most suspensions indicating reaction-limited aggregation. After aggregate sizes increase to >500 nm, the rate followed a power law suggesting diffusion-limited aggregation. Stability ratios and fractal dimension numbers were also calculated to further elucidate the aggregation mechanism.
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