Change in the microstructure at W/Si interface and surface by swift heavy ions

► The mixing induced by swift heavy ions at W/Si interface has been reported first time through this article. ► GIXRD result shows the formation of two type of tungsten silicides t-W5Si3 along with t-WSi2 by atomic mixing at the interface. ► AFM results revealed increase in surface roughness and grain size which increases with ion fluence and at the highest fluence grains become stable and converted into a particular shape showing the irradiation effect at the surface also.