Article ID Journal Published Year Pages File Type
610327 Journal of Colloid and Interface Science 2010 6 Pages PDF
Abstract

We describe a facile method to micropattern solid substrates: breath figure lithography (BFL). A honeycomb structured gold mask was prepared by sputter-coating a micro-porous polymer film with BF arrays, and then inductively coupled plasma reactive ion etching (ICP–RIE) transferred the patterns onto silicon wafer. The large etching rate selectivity between golden mask and substrate plays an important role in the effective transfer of the patterns. The versatility of the method was demonstrated by forming micropatterns on various solid substrates with adjustable sizes. Furthermore, the micropatterns on solid substrate could be replicated by PDMS stamp.

Graphical abstractPhotograph of sunlight diffraction obtained from a micropatterned silicon wafer by BFL.Figure optionsDownload full-size imageDownload high-quality image (44 K)Download as PowerPoint slide

Related Topics
Physical Sciences and Engineering Chemical Engineering Colloid and Surface Chemistry
Authors
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