Article ID Journal Published Year Pages File Type
6469596 Electrochemistry Communications 2017 4 Pages PDF
Abstract

•A tip current/positioning close-loop mode is designed for scanning electrochemical microscopy.•The motion trail of SECM tip can be pre-programmed by this positioning mode.•The SECM mode is verified powerful to fabricate arbitrary 3D microstructures.

Scanning electrochemical microscopy (SECM) has been approved as a prospective electrochemical micromachining (ECMM) technique soon after its birth. However, it still remains challenge for SECM to fabricate arbitrary three-dimensional (3D) microstructures because of the limitation of positioning system. To solve this problem, we proposed a tip current signal/positioning close-loop mode in which the tip current signal is fed back to the positioning system in order to program the motion trial of SECM tip. Both the triedge-cone and sinusoidal microstructures were obtained by the close-loop positioning mode. The static-state etching process was demonstrated not to be disturbed by the slow motion rate of SECM tip. The unique positioning mode would be significant for both ECMM and electrochemical imaging.

Related Topics
Physical Sciences and Engineering Chemical Engineering Chemical Engineering (General)
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