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Improved mechanical strength and reflectance of diamond wire sawn multi-crystalline silicon wafers by inductively coupled plasma (ICP) etching

Article ID Journal Published Year Pages File Type
6533983 Solar Energy Materials and Solar Cells 2018 6 Pages PDF
Keywords
ICPPlasma texturingMulti-crystalline siliconAnti-reflective
Related Topics
Physical Sciences and Engineering Chemical Engineering Catalysis
Preview
Improved mechanical strength and reflectance of diamond wire sawn multi-crystalline silicon wafers by inductively coupled plasma (ICP) etching
Authors
Felix Kaule, Benjamin Köhler, Jens Hirsch, Stephan Schoenfelder, Dominik Lausch,
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Journal
Solar Energy Materials and Solar Cells
Journal: Solar Energy Materials and Solar Cells
Related Categories
ICP
Plasma texturing
Multi-crystalline silicon
Anti-reflective
Bioengineering
Catalysis
Chemical Engineering (General)
Chemical Health and Safety
Colloid and Surface Chemistry
Filtration and Separation
Fluid Flow and Transfer Processes
Process Chemistry and Technology
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