Experimental estimation of transmissibility matrices for industrial multi-axis vibration isolation systems

Vibration isolation is essential for industrial high-precision systems to suppress external disturbances. The aim of this paper is to develop a general identification approach to estimate the frequency response function (FRF) of the transmissibility matrix, which is a key performance indicator for vibration isolation systems. The major challenge lies in obtaining a good signal-to-noise ratio in view of a large system weight. A non-parametric system identification method is proposed that combines floor and shaker excitations. Furthermore, a method is presented to analyze the input power spectrum of the floor excitations, both in terms of magnitude and direction. In turn, the input design of the shaker excitation signals is investigated to obtain sufficient excitation power in all directions with minimum experiment cost. The proposed methods are shown to provide an accurate FRF of the transmissibility matrix in three relevant directions on an industrial active vibration isolation system over a large frequency range. This demonstrates that, despite their heavy weight, industrial vibration isolation systems can be accurately identified using this approach.