On automating atomic force microscopes: An adaptive control approach

In this paper, modeling and experimental results are given to reveal the structure of atomic force microscope (AFM) dynamics and uncertainties which are strongly impacted by the user's choice of scan and controller parameters. A robust adaptive controller is designed to eliminate the need for the user to manually tune controller gains for different sample cantilever combinations and compensate for uncertainties arising from the user choice of different scan parameters. The performance of the designed adaptive controller is studied in simulation and verified through experiments. A substantial reduction in contact force can be achieved with the adaptive controller in comparison with an integral controller.