On the reduction of the non-diamond phase in nanocrystalline CVD diamond films

We present photocurrent spectra of nominally undoped nanocrystalline diamond (NCD) films grown on glass substrates by hot filament (HF) and microwave (MW) plasma enhanced chemical vapor deposition (CVD). The spectra were measured in a broad optical range (200–2000 nm) by dual-beam photocurrent spectroscopy (DBP) and Fourier-transform photocurrent spectroscopy (FTPS) in amplitude modulated step scan mode. The NCD films with carefully oxidized surface show photosensitivity and high dark resistivity. Unlike single crystal type IIa diamond with the photonization threshold at 5.5 eV, the photocurrent spectra of NCD films are dominated by the “non-diamond phase” with the photo-ionization threshold at about 0.8 eV. Some HF CVD samples have lower sub-band gap absorption (non-diamond phase contamination). The non-diamond phase content increases after annealing at elevated temperature. The non-diamond phase content can be reduced by exposing NCD to hydrogen plasma at temperature below 350 °C.