Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
701099 | Diamond and Related Materials | 2008 | 5 Pages |
Abstract
Plasma hydrogenation of polycrystalline diamond films results in a fully hydrogenated well-ordered diamond surface and etching of the amorphous phase located at grain boundaries. Vacuum annealing to 1000 °C followed by in-situ hydrogenation by thermal activated hydrogen of the bared diamond surface results in the formation of sp3-CHx adsorbed groups located on the top surface. Annealing of the in-situ hydrogenated surface to 600 °C results in desorption of these species and partial reconstruction of the film surface. Some irreversible surface degradation was detected in the in-situ annealed and hydrogenated surface compared to the state of the surface obtained upon plasma hydrogenation.
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Authors
A. Lafosse, M. Bertin, Sh. Michaelson, R. Azria, R. Akhvlediani, A. Hoffman,