| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 701199 | Diamond and Related Materials | 2008 | 5 Pages |
The use of diamond as the extraction window membrane for electron beam (EB) irradiation systems has been investigated by preliminary experiments and static simulations. The EB transmission characteristics of a fabricated 1.1 μm thick poly-crystalline diamond membrane were evaluated. A very high EB transmittance was observed, up to 70% at a 28 KeV accelerating voltage. Static simulations of EB extraction through a diamond membrane with a Si support have been carried out, under conditions from vacuum to atmosphere. Compared with Si, diamond/Si suffers a higher stress and strain, but, the displacement of a diamond film is much smaller. These results form a basis for the application of thin film, nanocrystalline and ultranano crystalline diamond on Si in the realization of the next generation miniature EB irradiation systems.
