| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 701320 | Diamond and Related Materials | 2007 | 4 Pages |
Abstract
This paper describes a general finite element method (FEM) for the AC steady state analysis of two-dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves corresponding to a AlN layer of 5.2 μm thick and a spatial periodicity of 12 μm. The structure admittance response shows peaks corresponding to the modes 0, 1, 2 and 3. The penetration depth in diamond is around 24 μm.
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Authors
L. Le Brizoual, O. Elmazria,