Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
701522 | Diamond and Related Materials | 2006 | 8 Pages |
Abstract
Sulfur-assisted hot-filament chemical vapor deposition was successfully employed to synthesize diamond films at relatively low substrate temperatures, sub 500 °C, on Mo and glass substrates. This result is ascribed to sulfur-containing species that create an additional carbon transport channel to the substrate, which explicitly requires a large temperature gradient to effectively operate. The grain size and roughness were found to decrease when the Mo substrate temperature was decreased, while the quality factor only showed a slight decrease. Moreover, the diamond quality, grain size, and roughness were found to increase on glass substrates in comparison to those on Mo substrates.
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Authors
F. Piazza, J.A. González, R. Velázquez, J. De Jesús, S.A. Rosario, G. Morell,