Dissipation in single crystal diamond micromechanical annular plate resonators

We report measurements of energy dissipation in single crystal diamond annular plate resonators for temperatures ranging from 4 to 300 K. An order of magnitude reduction in dissipation is observed as the temperature is lowered from room temperature (1/Q = 5 × 10−4) to 30 K (1/Q = 5 × 10−5).

► Single crystal diamond annular plate resonators; ~ 10 μm diameter, ~ 175 nm thick. ► ~ 50 MHz fundamental and 177 MHz overtone studied. ► Dissipation drops an order of magnitude with temperature from 300 K to 30 K. ► Dissipation up to factor of 5 lower than for ~ 50 MHz NCD or UNCD resonators.