Article ID Journal Published Year Pages File Type
702115 Diamond and Related Materials 2014 5 Pages PDF
Abstract

•The tool life was significantly improved by proposed heat treatment.•The machined surface quality was improved markedly.•Heating at 500 °C was optimal to remove the non-diamond phase from the diamond tools.

We describe a technique to improve diamond cutting tools used in nanometer- and micrometer-scale machining and formed via focused-ion-beam (FIB) micromachining. Although FIB irradiation is an effective means of fabricating arbitrary miniature shapes in diamond cutting tools, FIB irradiation induces a non-diamond phase, as well as Ga ion implantation, in the irradiated area. This adversely affects the performance of the ultra-precision machining process, especially in terms of tool life and the quality of the machined surface. To eliminate the affected layer, we applied heat-treatment techniques and investigated the optimum thermal profiles. A temperature of 500 °C applied to the cutting tool provided optimal machining of nickel phosphorus. The tool life was significantly improved, and a tool life similar to that of a non-irradiated diamond tool was obtained. The quality of the machined surface was also improved markedly owing to superior tool wear and adhesion resistance.

Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
Authors
, , , , ,