Reactive biased target ion beam deposited W–DLC nanocomposite thin films — Microstructure and its mechanical properties

Tungsten incorporated diamond like carbon (W–DLC) nanocomposite thin films with variable fractions of tungsten were deposited by using reactive biased target ion beam deposition technique. The influence of tungsten incorporation on the microstructure, surface topography, mechanical and tribological properties of the DLC were studied using X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, Atomic force microscope (AFM), transmission electron microscopy (TEM), nano-indentation and nano-scratch tests. The amount of W in films gets increases with increasing target bias voltage and most of the incorporated W reacts with carbon to form WC nanoclusters. Using TEM and FFT pattern, it was found that spherical shaped WC nanoclusters were uniformly dispersed in the DLC matrix and attains hexagonal (W2C) crystalline structure at higher W concentration. On the other hand, the incorporation of tungsten led to increase the formation of C-sp2 hybridized bonding in DLC network and which is reflected in the hardness and elastic modulus of W–DLC films. Moreover, W–DLC films show very low friction coefficient and increased adhesion to the substrate than the DLC film, which could be closely related to its unique nanostructure of the W incorporated thin films.

► W–DLC films deposited by a new Reactive Biased Target Ion Beam Sputtering. ► The effect of low W fraction on the properties of DLC film was investigated. ► The microstructure and mechanical properties are depending on W fraction. ► W–DLC films show very low friction coefficient and improved adhesion strength. ► RBTID is a promising technique to synthesize high quality protective coatings.