Article ID Journal Published Year Pages File Type
703361 Diamond and Related Materials 2006 4 Pages PDF
Abstract

Here we present data on growth of thin nanocrystalline diamond (NCD) layers on silicon and glass substrates by microwave plasma-enhanced chemical vapor deposition. The typical NCD layer thickness is below 500 nm with a typical grain size about 50 nm. NCD films are optically transparent, have a smooth surface and a low background photoluminescence. We have applied a radio-frequency (RF) plasma discharge in vaporized silane coupling agent N-(6-aminohexyl) aminopropyl trimethoxysilane to successfully functionalize the NCD surface with the primary amino group NH2 as confirmed by using fluorescamine-in-acetone spray as a fluorescence marker.

Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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