Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
703442 | Diamond and Related Materials | 2008 | 8 Pages |
CVD Diamond can now be deposited either in the form of single crystal homoepitaxial layers, or as polycrystalline films with crystal sizes ranging from mm, μm or nm, and with a variety of growth rates up to 100s of μm h− 1 depending upon deposition conditions. We previously developed a model which provides a coherent and unified picture that accounts for the observed growth rate, morphology, and crystal sizes, of all of these types of diamond. The model is based on competition between H atoms, CH3 radicals and other C1 radical species reacting with dangling bonds on the diamond surface. The approach leads to formulae for the diamond growth rate G and average crystallite size