Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
703449 | Diamond and Related Materials | 2008 | 5 Pages |
Abstract
We have studied MWPCVD for synthesis of diamond crystals to achieve high growth-rates over an area with 1-inch in diameter under input-power less than 5 kW. The numerical and experimental studies have conducted for both of conventional and proposed configurations. Qualitative correspondences between the numerical predications and experimental observations were found. For both configurations, we have been able to achieve the growth-rates larger than 50 μm/h over the large area under the limited input-power.
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Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno, Shin-ichi Shikata,