| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 703535 | Diamond and Related Materials | 2008 | 5 Pages |
Abstract
Carbon nanowalls (CNWs), two-dimensional nanostructured carbon, were synthesized by an electron beam excited plasma-enhanced chemical vapor deposition (EBEP-CVD) employing a mixture of CH4 and H2 at a total pressure of 2–4 Pa. High growth rate of 32 nm/min for the synthesis of well-defined, vertically aligned CNW film was attained at the total gas pressure of 4.0 Pa. CNWs were characterized by scanning electron microscopy, transmission electron microscopy, and micro-Raman spectroscopy. The EBEP-CVD proved to have a great potential for fabricating carbon nanostructures.
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Electrical and Electronic Engineering
Authors
Takateru Mori, Mineo Hiramatsu, Koji Yamakawa, Keigo Takeda, Masaru Hori,