| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 708767 | IFAC-PapersOnLine | 2016 | 12 Pages |
Abstract
This paper gives an exposition of examples of data-based control and optimization that found their way to successful application in the motion systems of industrial wafer scanners. The examples represent selective works brought together in an overview that highlights the possibilities, challenges, and open issues in data-based motion control of wafer scanners.
Related Topics
Physical Sciences and Engineering
Engineering
Computational Mechanics
Authors
M.F. Heertjes,