Article ID Journal Published Year Pages File Type
7110946 Diamond and Related Materials 2018 8 Pages PDF
Abstract
TEM images of subsurface damage in the soft (a) and hard (b) direction of single crystal diamond processed by MP, MCP and CMP.139
Keywords
Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
Preview
Surface damage of single-crystal diamond (100) processed based on a sol-gel polishing tool
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