Article ID Journal Published Year Pages File Type
7111382 Diamond and Related Materials 2016 17 Pages PDF
Abstract
In this study, investigation of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) film has been carried out. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Metals of Au, Pd, and Cu have been evaporated on the diamond surfaces to form Schottky junctions, whose barrier heights on O-/F-diamond have been investigated by X-ray photoelectron spectroscopy technique, the results of which indicate that the barrier heights of the metals on O-diamond are about 1.70 eV, and those on F-diamond are about 2.30 eV, respectively.
Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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